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크라이오 펌프 사용에 따른 스퍼터 방법으로 성막된 InGaZnO와 InZnSnO 박막 특성 평가
- Authors
- 정권범
- Issue Date
- 11-Feb-2025
- Place
- 대한민국
- Conference Name
- 한국진공학회
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Collections - College of Natural Science > Department of Physics > 2. Conference Papers
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Related Researcher
- Chung, Kwun Bum
- College of Natural Science (Department of Physics)