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크라이오 펌프 사용에 따른 스퍼터 방법으로 성막된 InGaZnO와 InZnSnO 박막 특성 평가
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정권범 | - |
| dc.date.accessioned | 2026-01-17T00:31:38Z | - |
| dc.date.available | 2026-01-17T00:31:38Z | - |
| dc.date.issued | 2025-02-11 | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/63313 | - |
| dc.title | 크라이오 펌프 사용에 따른 스퍼터 방법으로 성막된 InGaZnO와 InZnSnO 박막 특성 평가 | - |
| dc.type | Conference | - |
| dc.citation.startPage | 1 | - |
| dc.citation.endPage | 1 | - |
| dc.citation.conferenceName | 한국진공학회 | - |
| dc.citation.conferencePlace | 대한민국 | - |
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Collections - College of Natural Science > Department of Physics > 2. Conference Papers
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Related Researcher
- Chung, Kwun Bum
- College of Natural Science (Department of Physics)