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고온 스퍼터링법으로 제작된 티타늄 실리사이드의 구조적 전기적특성
- Authors
- 송민규
- Issue Date
- 23-Jun-2000
- Place
- 대한민국
전남대/광주
- Conference Date
- 2000-06-23 ~ 2000-06-24
- Conference Name
- 대한전자공학회 2000년도 하계종합학술대회
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Related Researcher
- Song, Min Kyu
- College of Advanced Convergence Engineering (Division of System Semiconductor)