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고온 스퍼터링법으로 제작된 티타늄 실리사이드의 구조적 전기적특성
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 송민규 | - |
| dc.date.accessioned | 2024-10-30T02:31:54Z | - |
| dc.date.available | 2024-10-30T02:31:54Z | - |
| dc.date.issued | 2000-06-23 | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/37156 | - |
| dc.title | 고온 스퍼터링법으로 제작된 티타늄 실리사이드의 구조적 전기적특성 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 대한전자공학회 2000년도 하계종합학술대회 | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.conferencePlace | 전남대/광주 | - |
| dc.citation.conferenceDate | 2000-06-23 ~ 2000-06-24 | - |
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Related Researcher
- Song, Min Kyu
- College of Advanced Convergence Engineering (Division of System Semiconductor)