Spin_On_Dielectric 물질을 이용한 Metal_Oxide_Semiconductor_Structure

김삼동; 고필석; 정성호

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Spin_On_Dielectric 물질을 이용한 Metal_Oxide_Semiconductor_StructureMOS structure using Spin_On_Dielectric

Alternative Title: MOS structure using Spin_On_Dielectric

Authors: 김삼동; 고필석; 정성호

URI: https://scholarworks.dongguk.edu/handle/sw.dongguk/60019

Abstract: 본 발명은 전력 반도체 소자에서 Spin-On-Dielectric 물질을 이용한 MOS 구조를 제작함으로써 기존 공정에서 사용되던 PVD, CVD의 다른방법을 제시한다.

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Appears in Collections: College of Engineering > Department of Electronics and Electrical Engineering > 4. Patents

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