Suppression of defect states in poly Si for thin film based devices using proton and hellium implantation

조훈영

Detailed Information

Cited 0 time in webofscience

Cited 0 time in scopus

Metadata Downloads

Suppression of defect states in poly Si for thin film based devices using proton and hellium implantation

Authors: 조훈영

Issue Date: 9-Jun-2009

URI: https://scholarworks.dongguk.edu/handle/sw.dongguk/42184

Place: 독일
스트라스브르그

Conference Date: 2009-06-08 ~ 2009-06-12

Conference Name: EMRS 2009

Files in This Item: There are no files associated with this item.

Appears in Collections: College of Natural Science > Department of Physics > 2. Conference Papers

Show full item record

qrcode

Altmetrics

Total Views & Downloads

RSS_1.0 RSS_2.0 ATOM_1.0

30, Pildong-ro 1-gil, Jung-gu, Seoul, 04620, Republic of Korea+82-2-2260-3114

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

Detailed Information

Altmetrics

Total Views & Downloads

BROWSE