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Suppression of defect states in poly Si for thin film based devices using proton and hellium implantation

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dc.contributor.author조훈영-
dc.date.accessioned2024-10-30T06:22:27Z-
dc.date.available2024-10-30T06:22:27Z-
dc.date.issued2009-06-09-
dc.identifier.urihttps://scholarworks.dongguk.edu/handle/sw.dongguk/42184-
dc.titleSuppression of defect states in poly Si for thin film based devices using proton and hellium implantation-
dc.typeConference-
dc.citation.conferenceNameEMRS 2009-
dc.citation.conferencePlace독일-
dc.citation.conferencePlace스트라스브르그-
dc.citation.conferenceDate2009-06-08 ~ 2009-06-12-
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College of Natural Science > Department of Physics > 2. Conference Papers

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