Effect of Cu diffusion in Cu/TiN/SiO₂/Si capacitors by C-V measurements

신동혁

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Effect of Cu diffusion in Cu/TiN/SiO₂/Si capacitors by C-V measurements

Authors: 신동혁

Issue Date: 25-Feb-1998

URI: https://scholarworks.dongguk.edu/handle/sw.dongguk/39837

Place: 대한민국
서울

Conference Date: 1998-02-25 ~ 1998-02-27

Conference Name: 한국반도체 학술대회 제5회

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Appears in Collections: ETC > 2. Conference Papers

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