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SF6+Ar 혼합기체의 전리 및 부착계수에 관한 연구
- Authors
- 하성철
- Issue Date
- 9-Nov-2000
- Place
- 대한민국
한국전기연구소,창원
- Conference Date
- 2000-11-09 ~ 2000-11-11
- Conference Name
- 2000년도 한국전기전자재료학회 추계대회
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