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SF6+Ar 혼합기체의 전리 및 부착계수에 관한 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 하성철 | - |
| dc.date.accessioned | 2024-10-30T02:31:06Z | - |
| dc.date.available | 2024-10-30T02:31:06Z | - |
| dc.date.issued | 2000-11-09 | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/36911 | - |
| dc.title | SF6+Ar 혼합기체의 전리 및 부착계수에 관한 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2000년도 한국전기전자재료학회 추계대회 | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.conferencePlace | 한국전기연구소,창원 | - |
| dc.citation.conferenceDate | 2000-11-09 ~ 2000-11-11 | - |
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