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RTLPCVD법에 의해 sapphire(1102)위에 제작된 Si 박막의 특성
- Authors
- 조훈영
- Issue Date
- 5-Jul-2001
- Place
- 대한민국
한국과학기술원
- Conference Date
- 2001-07-05 ~ 2001-07-06
- Conference Name
- 진공학회 학술대회
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Collections - College of Natural Science > Department of Physics > 2. Conference Papers
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