50 nm InGaAs/InAlAs/GaAs Metamorphic HEMTs using double exposure without the dielectric support

이진구

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50 nm InGaAs/InAlAs/GaAs Metamorphic HEMTs using double exposure without the dielectric support

Authors: 이진구

Issue Date: 19-Feb-2004

URI: https://scholarworks.dongguk.edu/handle/sw.dongguk/34302

Place: 대한민국
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Conference Date: 2004-02-19 ~ 2004-02-20

Conference Name: 제11회 반도체 학술대회

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Appears in Collections: ETC > 2. Conference Papers

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