RF 마그네트론 스퍼터법에 의한 Zn1-xMnxO 박막의 형성과 특성에 관한 연구

김득영

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RF 마그네트론 스퍼터법에 의한 Zn1-xMnxO 박막의 형성과 특성에 관한 연구

Authors: 김득영

Issue Date: 19-Feb-2004

URI: https://scholarworks.dongguk.edu/handle/sw.dongguk/34094

Place: 대한민국
무주리조트, 무주

Conference Date: 2004-02-19 ~ 2004-02-20

Conference Name: 한국반도체학술대회

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Appears in Collections: College of Natural Science > Division of Physics & Semiconductor Science > 2. Conference Papers

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