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볼츠만 방정식에 의한 CF4분자가스의 전리 및 부착계수에 관한연구
- Authors
- 하성철
- Issue Date
- 11-Nov-2004
- Place
- 대한민국
고려대학교, 서울
- Conference Date
- 2004-11-11 ~ 2004-11-13
- Conference Name
- 2004년 한국전지전자재료학회 추계학술대회
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