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Cited 36 time in webofscience Cited 40 time in scopus
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Reliability of Crystalline Indium-Gallium-Zinc-Oxide Thin-Film Transistors Under Bias Stress With Light Illumination

Authors
Park, KyungPark, Hyun-WooShin, Hyun SooBae, JongukPark, Kwon-ShikKang, InbyeongChung, Kwun-BumKwon, Jang-Yeon
Issue Date
Sep-2015
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Keywords
Crystallization; electronic structure; indium-gallium-zinc-oxide (IGZO) thin-film transistors (TFTs); oxide semiconductor; reliability
Citation
IEEE TRANSACTIONS ON ELECTRON DEVICES, v.62, no.9, pp 2900 - 2905
Pages
6
Indexed
SCI
SCIE
SCOPUS
Journal Title
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume
62
Number
9
Start Page
2900
End Page
2905
URI
https://scholarworks.dongguk.edu/handle/sw.dongguk/25411
DOI
10.1109/TED.2015.2458987
ISSN
0018-9383
1557-9646
Abstract
We investigate the effect of crystalline indium-gallium-zinc-oxide (c-IGZO) thin films on device performance, and evaluate the device reliability of c-IGZO under positive/negative bias stress with/without illumination. The crystal structure of deposited-IGZO thin film is controlled by annealing temperatures, and the transition from an amorphous to a crystalline structure is observed at above 800 degrees C. Even though the c-IGZO thin-film transistors (TFTs) exhibit lower carrier mobility, compared with amorphous IGZO (a-IGZO) TFTs, the remarkable improvement of the device reliability for the c-IGZO TFTs is observed especially under the bias stress with illumination. This comes from lower defect density compared with the a-IGZO film.
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