Group-Exclusive Feature Group Lasso and Applications to Automatic Sensor Selection for Virtual Metrology in Semiconductor Manufacturing
Citations

WEB OF SCIENCE

4
Citations

SCOPUS

4

초록

Group lasso is a regularization widely used for feature group selection with sparsity at a group level in machine learning. Training a model with the group lasso regularization, however, leads to the selection of all the groups together that are closely related to each other although their features are useful to predict a target. In this study, we propose a new regularization, group-exclusive group lasso, for automatic exclusive feature group selection. The proposed regularization aims to enforce exclusive sparsity at an inter-group level, discouraging the coincident selection of the feature groups that are group-level correlated and share predictive powers toward the targets. The proposed method aims at higher group sparsity for selecting salient feature groups only, and is applied to neural networks. We evaluate the proposed regularization in neural networks on synthetic datasets and a real-life case for virtual metrology with automatic sensor selection in semiconductor manufacturing. IEEE

키워드

Artificial neural networksData modelsFeature extractionGroup exclusivitygroup sparsityMetrologyModelingregularizationsensor selectionTrainingVectorsvirtual metrology
제목
Group-Exclusive Feature Group Lasso and Applications to Automatic Sensor Selection for Virtual Metrology in Semiconductor Manufacturing
저자
Choi, JeongsubSon, YoungdooKang, Jihoon
DOI
10.1109/TSM.2024.3444720
발행일
2024-11
유형
Article
저널명
IEEE Transactions on Semiconductor Manufacturing
37
4
페이지
505 ~ 517