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실린더 타겟 회전 주파수에 따른 금속 박막 특성 변화

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dc.contributor.author정권범-
dc.date.accessioned2026-01-17T00:31:39Z-
dc.date.available2026-01-17T00:31:39Z-
dc.date.issued2025-02-11-
dc.identifier.urihttps://scholarworks.dongguk.edu/handle/sw.dongguk/63314-
dc.title실린더 타겟 회전 주파수에 따른 금속 박막 특성 변화-
dc.typeConference-
dc.citation.startPage1-
dc.citation.endPage1-
dc.citation.conferenceName한국진공학회-
dc.citation.conferencePlace대한민국-
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