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Optimization of PEALD Al2O3 Deposition Temperature for High-Performance Thin-Film Transistors
- Authors
- 김현석
- Issue Date
- 18-Jun-2025
- Place
- 대한민국
- Conference Name
- GCIM 2025
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Related Researcher
- Kim, Hyun Suk
- College of Engineering (Department of Energy and Materials Engineering)