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저온 PEALD를 통한 고이동도 결정질 In2O3와 이를 활용한 강유전체 전계효과 트랜지스터
- Authors
- 김현석
- Issue Date
- 13-Nov-2025
- Place
- 대한민국
- Conference Name
- 2025 한국재료학회
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Related Researcher
- Kim, Hyun Suk
- College of Engineering (Department of Energy and Materials Engineering)