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희생층이 도입된 탐침 기반 리소그래피tip based lithography with a sacrificial layer
- Alternative Title
- tip based lithography with a sacrificial layer
- Abstract
- 탐침기반리소그래피 기법에 희생층을 도입 활용하여 금 나노구명을 제작하는 방법 및 이를 활용한 응용을 보고함.
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Related Researcher
- Jang, Jae Won
- College of Advanced Convergence Engineering (Division of System Semiconductor)