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박막 결함 분석 장치 및 박막 결함 분석 방법

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dc.contributor.author정권범-
dc.contributor.author손경석-
dc.contributor.author임준형-
dc.contributor.author홍현민-
dc.date.accessioned2025-09-09T10:04:16Z-
dc.date.available2025-09-09T10:04:16Z-
dc.identifier.urihttps://scholarworks.dongguk.edu/handle/sw.dongguk/61517-
dc.title박막 결함 분석 장치 및 박막 결함 분석 방법-
dc.typePatent-
dc.publisher.location대한민국-
dc.contributor.assignee동국대학교산학협력단;삼성디스플레이(주)-
dc.date.application2020-07-13-
dc.date.registration2025-05-12-
dc.type.iprs특허-
dc.identifier.patentRegistrationNumber10-2808660-
dc.identifier.patentApplicationNumber10-2020-0086436-
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