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Free-standing Si films as anode for lithium-ion batteries through ArF-dry photolithography and ICP-RIE etch process
- Authors
- 김현석
- Issue Date
- 3-Nov-2023
- Place
- 대한민국
- Conference Name
- 2023년도 추계총회 및 학술발표회
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Related Researcher
- Kim, Hyun Suk
- College of Engineering (Department of Energy and Materials Engineering)