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C_4F_4-Ar혼합기체에서의 Plasma Discharge Simulation을 위한 C_4F_6 초기단면적 결정
- Authors
- 전병훈
- Issue Date
- 21-Jul-2011
- Place
- 대한민국
- Conference Date
- 2011-07-20 ~ 2011-07-22
- Conference Name
- 대한전기학회 제42회 하계학술대회
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Related Researcher
- Jeon, Byung Hoon
- College of Engineering (Department of Electronics and Electrical Engineering)