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C_4F_4-Ar혼합기체에서의 Plasma Discharge Simulation을 위한 C_4F_6 초기단면적 결정
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전병훈 | - |
| dc.date.accessioned | 2024-10-30T11:03:06Z | - |
| dc.date.available | 2024-10-30T11:03:06Z | - |
| dc.date.issued | 2011-07-21 | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/46325 | - |
| dc.title | C_4F_4-Ar혼합기체에서의 Plasma Discharge Simulation을 위한 C_4F_6 초기단면적 결정 | - |
| dc.type | Conference | - |
| dc.citation.startPage | 1 | - |
| dc.citation.endPage | 2 | - |
| dc.citation.conferenceName | 대한전기학회 제42회 하계학술대회 | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.conferenceDate | 2011-07-20 ~ 2011-07-22 | - |
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Related Researcher
- Jeon, Byung Hoon
- College of Engineering (Department of Electronics and Electrical Engineering)