Effect of ultraviolet irradiation on the defect states and charge transport properties of low-k SiOC(-H) dielectric films deposited by UV-assisted PECVD

자키로브

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Effect of ultraviolet irradiation on the defect states and charge transport properties of low-k SiOC(-H) dielectric films deposited by UV-assisted PECVD

Authors: 자키로브

Issue Date: 27-Jul-2010

URI: https://scholarworks.dongguk.edu/handle/sw.dongguk/43758

Place: 대한민국
코엑스

Conference Date: 2010-07-25 ~ 2010-07-30

Conference Name: 30th International Conference on the Physics of Semiconductors

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Appears in Collections: ETC > 2. Conference Papers

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