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Effect of ultraviolet irradiation on the defect states and charge transport properties of low-k SiOC(-H) dielectric films deposited by UV-assisted PECVD
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 자키로브 | - |
| dc.date.accessioned | 2024-10-30T08:03:03Z | - |
| dc.date.available | 2024-10-30T08:03:03Z | - |
| dc.date.issued | 2010-07-27 | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/43758 | - |
| dc.title | Effect of ultraviolet irradiation on the defect states and charge transport properties of low-k SiOC(-H) dielectric films deposited by UV-assisted PECVD | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 30th International Conference on the Physics of Semiconductors | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.conferencePlace | 코엑스 | - |
| dc.citation.conferenceDate | 2010-07-25 ~ 2010-07-30 | - |
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