Fabrication of novel SiC nanopillars by ICP Etching

카투

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Fabrication of novel SiC nanopillars by ICP Etching

Authors: 카투

Issue Date: 18-Dec-2009

URI: https://scholarworks.dongguk.edu/handle/sw.dongguk/43059

Place: 인도
Hotel Ashok

Conference Date: 2009-12-16 ~ 2009-12-19

Conference Name: The 12th International Symposium on Microwave and Optical Technology (ISMOT-2009)

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Appears in Collections: College of Engineering > ETC > 2. Conference Papers

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