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Fabrication of novel SiC nanopillars by ICP Etching
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 카투 | - |
| dc.date.accessioned | 2024-10-30T07:22:31Z | - |
| dc.date.available | 2024-10-30T07:22:31Z | - |
| dc.date.issued | 2009-12-18 | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/43059 | - |
| dc.title | Fabrication of novel SiC nanopillars by ICP Etching | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | The 12th International Symposium on Microwave and Optical Technology (ISMOT-2009) | - |
| dc.citation.conferencePlace | 인도 | - |
| dc.citation.conferencePlace | Hotel Ashok | - |
| dc.citation.conferenceDate | 2009-12-16 ~ 2009-12-19 | - |
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Collections - College of Engineering > ETC > 2. Conference Papers
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Related Researcher
- Kathalingam, Adaikalam
- College of Engineering