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RIE공정에서 SF6/O₂조성비에 따른 6H-Sic의 식각특성연구
- Authors
- 신동혁
- Issue Date
- 26-Apr-1996
- Place
- 대한민국
수원
- Conference Date
- 1996-04-26 ~ 1996-04-27
- Conference Name
- '96 한국물리학회 춘계학술발표회
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