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LPCVD 방법에 의한 3C-SiC 박막성장에 관한 연구
- Authors
- 신동혁
- Issue Date
- 25-Apr-1997
- Place
- 대한민국
울산대
- Conference Date
- 1997-04-25 ~ 1997-04-26
- Conference Name
- 한국물리학회 제73회 학술발표회
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