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LPCVD 방법에 의한 3C-SiC 박막성장에 관한 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 신동혁 | - |
| dc.date.accessioned | 2024-10-30T04:02:18Z | - |
| dc.date.available | 2024-10-30T04:02:18Z | - |
| dc.date.issued | 1997-04-25 | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/39835 | - |
| dc.title | LPCVD 방법에 의한 3C-SiC 박막성장에 관한 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국물리학회 제73회 학술발표회 | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.conferencePlace | 울산대 | - |
| dc.citation.conferenceDate | 1997-04-25 ~ 1997-04-26 | - |
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