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PECVD로 성장된 a-SiCiM 박막의 광학적 특성연구
- Authors
- 신동혁
- Issue Date
- 27-Feb-1998
- Place
- 대한민국
청주
- Conference Date
- 1998-02-27 ~ 1998-02-28
- Conference Name
- 한국진공학회 학술발표회(제14회)
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