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PECVD로 성장된 a-SiCiM 박막의 광학적 특성연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 신동혁 | - |
| dc.date.accessioned | 2024-10-30T04:02:18Z | - |
| dc.date.available | 2024-10-30T04:02:18Z | - |
| dc.date.issued | 1998-02-27 | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/39834 | - |
| dc.title | PECVD로 성장된 a-SiCiM 박막의 광학적 특성연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국진공학회 학술발표회(제14회) | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.conferencePlace | 청주 | - |
| dc.citation.conferenceDate | 1998-02-27 ~ 1998-02-28 | - |
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