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Effect of substrates temperature and annealing on Ti-silicide formation

Authors
정웅
Issue Date
6-Oct-1999
URI
https://scholarworks.dongguk.edu/handle/sw.dongguk/38067
Place
대한민국
한양대
Conference Date
1999-10-06 ~ 1999-10-08
Conference Name
1999 국제 첨단재료 및 반도체소자 학술대회
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College of Advanced Convergence Engineering > ETC > 2. Conference Papers

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