DC/RF Magnetron Sputtering Deposition법에 의한 TiSi2 박막의특성 연구

김득영

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DC/RF Magnetron Sputtering Deposition법에 의한 TiSi2 박막의특성 연구

Authors: 김득영

Issue Date: 2-Jul-1999

URI: https://scholarworks.dongguk.edu/handle/sw.dongguk/38047

Place: 대한민국
제주

Conference Date: 1999-07-02 ~ 1999-07-03

Conference Name: 한국진공학회 제17회 학술발표회

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Appears in Collections: College of Natural Science > Division of Physics & Semiconductor Science > 2. Conference Papers

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