Effect of substrates temperature and annealing on Ti-silicide

김득영

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Effect of substrates temperature and annealing on Ti-silicide

Authors: 김득영

Issue Date: 6-Oct-1999

URI: https://scholarworks.dongguk.edu/handle/sw.dongguk/38046

Place: 대한민국
한양대

Conference Date: 1999-10-06 ~ 1999-10-08

Conference Name: 1999 국제 첨단재료 및 반도체소자 학술대회

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Appears in Collections: College of Natural Science > Division of Physics & Semiconductor Science > 2. Conference Papers

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