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DC/RF Magnetron Sputtering Deposition법에 의한 TiSi₂박막의특성연구
- Authors
- 정웅
- Issue Date
- 2-Jul-1999
- Place
- 대한민국
제주
- Conference Date
- 1999-07-02 ~ 1999-07-03
- Conference Name
- 한국진공학회 제17회 학술발표회
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Collections - College of Advanced Convergence Engineering > ETC > 2. Conference Papers
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