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DC/RF Magnetron Sputtering Deposition법에 의한 TiSi₂박막의특성연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정웅 | - |
| dc.date.accessioned | 2024-10-30T02:41:38Z | - |
| dc.date.available | 2024-10-30T02:41:38Z | - |
| dc.date.issued | 1999-07-02 | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/37415 | - |
| dc.title | DC/RF Magnetron Sputtering Deposition법에 의한 TiSi₂박막의특성연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국진공학회 제17회 학술발표회 | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.conferencePlace | 제주 | - |
| dc.citation.conferenceDate | 1999-07-02 ~ 1999-07-03 | - |
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