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Effect of surbstrate temperature and annealing on Ti-silicide formation

Authors
조훈영
Issue Date
6-Oct-1999
URI
https://scholarworks.dongguk.edu/handle/sw.dongguk/37392
Place
대한민국
한양대
Conference Date
1999-10-06 ~ 1999-10-08
Conference Name
International Conference on Advanced Materials and Devices '99
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College of Natural Science > Department of Physics > 2. Conference Papers

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