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고온 스퍼터링법으로 제작된 티타늄 실리사이드의 구조적 전기적 특성 연구

Authors
정웅
Issue Date
23-Jun-2000
URI
https://scholarworks.dongguk.edu/handle/sw.dongguk/37061
Place
대한민국
전남대/광주
Conference Date
2000-06-23 ~ 2000-06-24
Conference Name
대한전자공학회 2000년도 하계종합학술대회
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College of Advanced Convergence Engineering > ETC > 2. Conference Papers

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