P-Si기판 위에 형성된 SiO2/SiN/SiO2박막의 특성에 관한 연구

김득영

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P-Si기판 위에 형성된 SiO2/SiN/SiO2박막의 특성에 관한 연구

Authors: 김득영

Issue Date: 23-Jun-2000

URI: https://scholarworks.dongguk.edu/handle/sw.dongguk/37038

Place: 대한민국
전남대/광주

Conference Date: 2000-06-23 ~ 2000-06-24

Conference Name: 대한전자공학회 2000년도 하계종합학술발표대회

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Appears in Collections: College of Natural Science > Division of Physics & Semiconductor Science > 2. Conference Papers

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