Effects of He gas on hydrogen content and passivation of GaAs PHEMT with SiN films

박현창

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Effects of He gas on hydrogen content and passivation of GaAs PHEMT with SiN films

Authors: 박현창

Issue Date: 28-Jun-2000

URI: https://scholarworks.dongguk.edu/handle/sw.dongguk/36482

Place: 일본
Okinawa

Conference Date: 2000-06-28 ~ 2000-06-30

Conference Name: 2000 A-Pac Workshop on Fundamental&Application of Advanced Semiconductor Devices

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Appears in Collections: College of Engineering > Department of Electronics and Electrical Engineering > 2. Conference Papers

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Park, Hyun Chang: College of Engineering (Department of Electronics and Electrical Engineering)

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