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Effects of He gas on hydrogen content and passivation of GaAs PHEMT with SiN films
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박현창 | - |
| dc.date.accessioned | 2024-10-30T02:11:46Z | - |
| dc.date.available | 2024-10-30T02:11:46Z | - |
| dc.date.issued | 2000-06-28 | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/36482 | - |
| dc.title | Effects of He gas on hydrogen content and passivation of GaAs PHEMT with SiN films | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2000 A-Pac Workshop on Fundamental&Application of Advanced Semiconductor Devices | - |
| dc.citation.conferencePlace | 일본 | - |
| dc.citation.conferencePlace | Okinawa | - |
| dc.citation.conferenceDate | 2000-06-28 ~ 2000-06-30 | - |
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Related Researcher
- Park, Hyun Chang
- College of Engineering (Department of Electronics and Electrical Engineering)