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RTLPCVD법에 의한 sapphire(1102) 위에 제작된 Si 박막의 특성
- Authors
- 김득영
- Issue Date
- 5-Jul-2001
- Place
- 대한민국
KAIST,대전
- Conference Date
- 2001-07-05 ~ 2001-07-06
- Conference Name
- 한국진공학회 제21회 학술발표회
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