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SF6-Ar 혼합가스에서의 압력 의존도 해석
- Authors
- 하성철
- Issue Date
- 8-Jul-2002
- Place
- 대한민국
제주대
- Conference Date
- 2002-07-08 ~ 2002-07-10
- Conference Name
- 한국전기전자재료학회 하계학술대회
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