RF Magnetron Sputter법으로 성장된 Zn1-xMnxO 박막의 Rapid Thermal Annealing 효과

김득영

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RF Magnetron Sputter법으로 성장된 Zn1-xMnxO 박막의 Rapid Thermal Annealing 효과

Authors: 김득영

Issue Date: 11-Feb-2004

URI: https://scholarworks.dongguk.edu/handle/sw.dongguk/34095

Place: 대한민국
서울대학교, 서울

Conference Date: 2004-02-11 ~ 2004-02-12

Conference Name: 한국진공학회 학술발표회

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Appears in Collections: College of Natural Science > Division of Physics & Semiconductor Science > 2. Conference Papers

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