Metamorphic HEMT에서 low-k Benzocyclobutene(BCB)를 이용한 표면 passivation 비교 연구

이진구

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Metamorphic HEMT에서 low-k Benzocyclobutene(BCB)를 이용한 표면 passivation 비교 연구

Authors: 이진구

Issue Date: 21-Jun-2006

URI: https://scholarworks.dongguk.edu/handle/sw.dongguk/29124

Place: 대한민국
제주 롯데호텔

Conference Date: 2006-06-21 ~ 2006-06-23

Conference Name: 2006년도 하계 종합학술대회

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Appears in Collections: ETC > 2. Conference Papers

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