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Activation of sputter-processed indium-gallium-zinc oxide films by simultaneous ultraviolet and thermal treatmentsopen access

Tak, Young Jun; Ahn, Byung Du; Park, Sung Pyo; Kim, Si Joon; Song, Ae Ran; Chung, Kwun-Bum; Kim, Hyun Jae

ArticleIssue Date2016CitationSCIENTIFIC REPORTS, v.6PublisherNATURE PUBLISHING GROUP
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