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Mass Fabrication of 3D Silicon Nano-/Microstructures by Fab-Free Process Using Tip-Based Lithography

Jo, Jeong-Sik; Choi, Jihoon; Lee, Seung-Hoon; Song, Changhoon; Noh, Heeso; Jang, Jae-Won

ArticleIssue Date2021CitationSMALL, v.17, no.4PublisherWILEY-V C H VERLAG GMBH
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