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Attaining quantitatively fewer defects in close-packed InGaZnO synthesized using atomic layer deposition

Kim, Yoon-Seo; Hong, Hyunmin; Hong, TaeHyun; Choi, Su-Hwan; Chung, Kwun-Bum; Park, Jin-Seong

ArticleIssue Date2024CitationApplied Surface Science, v.664, pp 1 - 6PublisherElsevier BV
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